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Direct bonding of titanium layers on silicon

✍ Scribed by F. Baudin, L. Di Cioccio, V. Delaye, N. Chevalier, J. Dechamp…

Book ID: 120914846
Publisher: Springer-Verlag
Year: 2012
Tongue: English
Weight: 714 KB
Volume: 19
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-012-1664-0

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