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Silicon oxide and nitride films deposited by an r.f. glow-discharge

✍ Scribed by R.J. Joyce; H.F. Sterling; J.H. Alexander

Book ID: 107859749
Publisher: Elsevier Science
Year: 1968
Tongue: English
Weight: 602 KB
Volume: 1
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(68)90075-8

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