𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Characterization of silicon nitride films formed in an RF glow discharge

✍ Scribed by Kenji Murakami; Takayuki Takeuchi; Kenji Ishikawa; Tatsuo Yamamoto

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
309 KB
Volume
33-34
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Characterization of undoped ΞΌc-SiO:H fil
Characterization of undoped ΞΌc-SiO:H films prepared from (SiH4 + CO2 + H2)-plasma in RF glow discharge
πŸ“‚ Article πŸ“… 2001 πŸ› Elsevier Science βš– 196 KB

investieations on solar thermal collectors and solar systems within the precedyng IEA Task X (1985)(1986)(1987)(1988)(1989)(1990)(1991) as well as further studies in this field by the group itself formed a basis for this work. The procedure was formulated as g standard, and submitted to IS0 at the b

Nanometric powder of stoichiometric sili
Nanometric powder of stoichiometric silicon carbide produced in square-wave modulated RF glow discharges
✍ G Viera; S.N Sharma; J.L ΓΊjar; R.Q Zhang; J Costa; E Bertran πŸ“‚ Article πŸ“… 1999 πŸ› Elsevier Science 🌐 English βš– 237 KB

SiC nanometric powder has been obtained in square-wave modulated radiofrequency glow discharges from CH 4 and SiH 4 gas mixtures. Chemical and structural characterization revealed that the as-deposited SiC:H powder underwent spontaneous oxidation when exposed to atmosphere. To stabilise the powder c