Characterization of microcrystalline silicon films prepared by the glow discharge method under different deposition conditions

✍ Scribed by Swati Ray; S.C. De; A.K. Barua

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 449 KB
• Volume: 156
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(88)90322-7