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Optical constants of silicon films deposited by the r.f. glow discharge of SiCl4

✍ Scribed by V. Augelli; R. Murri; L. Schiavulli; G. Bruno; P. Capezzuto; F. Cramarossa; F. Evangelisti; G. Fortunato


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
490 KB
Volume
86
Category
Article
ISSN
0040-6090

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