Silicon-on-insulator: materials aspects and technological applications
โ Scribed by G Bomchil
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 376 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
The motivation to develop high-temperature resistant smart-power products and the impact of silicon-on-insulator (SOI) technology are discussed. The electrical and thermal behaviour of devices on SOI-substrates is illustrated, with examples, showing that smart-power integrated circuits can be design
The wide applicability of spectroscopic ellipsometry (S/z) to characterize non-destructively silicon-on-insulator materials is illustrated with a number of case studies. SE allows the determination of not only the optical properties of single layers as a fimction of the wavelength but also their thi