7248. Silicon-on-insulator: materials aspects and technological applications: G Bomchil,Vacuum, 41, 1990, 781–783

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 140 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91055-s