Silicon-on-insulator: materials aspects and technological applications : G. Bomchil. Vacuum 41(4) 781 (1990)

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 133 KB
• Volume: 31
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(91)90440-i