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Silicon nitride elaborated by low pressure chemical vapour deposition from Si2H6 and NH3 at low temperature

✍ Scribed by E. Scheid; L.K. Kouassi; R. Henda; J. Samitier; J.R. Morante

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 426 KB
Volume: 17
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(93)90103-t

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