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Silicon deposited by low pressure chemical vapour deposition from Si2H6: experiments, modelling and properties

✍ Scribed by E. Scheid; J.J. Pedroviejo; P. Duverneuil; M. Gueye; J. Samitier; A. El Hassani; D. Bielle-Daspet

No coin nor oath required. For personal study only.

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