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Silicon Nanowire Resonator with Integrated Electrostatic Actuation

✍ Scribed by Alexandra Koumela; Denis Mercier; Vincent Gouttenoire; Carine Marcoux; Stephen T. Purcell; Laurent Duraffourg

Book ID
119355872
Publisher
Elsevier
Year
2011
Tongue
English
Weight
874 KB
Volume
25
Category
Article
ISSN
1877-7058

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