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A silicon microvalve with combined electromagnetic/electrostatic actuation

✍ Scribed by D. Bosch; B. Heimhofer; G. Mück; H. Seidel; U. Thumser; W. Welser

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
996 KB
Volume
37-38
Category
Article
ISSN
0924-4247

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✦ Synopsis

We report on the design, fabncatlon and performance of a s&on nucrovalve for small gas flows It consists of two mlcromachmed components which are bonded together One part contams the gas flow inlet, the other part a deflectable silicon membrane Tlus membrane may be activated by a combmation of electromagnetic and electrostatic forces This pnnnple 1s especially useful for muumlzmg the power consumption The mam expernnental results are as follows The maxImum pressure agamst which the valve can fully operate 1s 160 mbar With tlus pressure, a flow of up to 3 ml/mm can be controlled Typically, current pulses of 200 mA and voltage amplitudes of 30 V are applied for electromagnetic and electrostatic actuation, respectively The sv&chmg time 1s below 0 4 ms

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