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FEEDBACK CONTROL OF VIBRATIONS IN A MICROMACHINED CANTILEVER BEAM WITH ELECTROSTATIC ACTUATORS

โœ Scribed by P.K.C. Wang


Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
278 KB
Volume
213
Category
Article
ISSN
0022-460X

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โœฆ Synopsis


The problem of feedback control of vibrations in a micromachined cantilever beam with nonlinear electrostatic actuators is considered. Various forms of nonlinear feedback controls depending on localized spatial averages of the beam velocity and displacement near the beam tip are derived by considering the time rate-of-change of the total energy of the beam. The physical implementation of the derived feedback controls is discussed briefly. The dynamic behaviour of the beam with the derived feedback controls is determined by computer simulation.


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