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Characterization of active silicon microvalves with piezoelectric membrane actuators

✍ Scribed by A. Doll; M. Wischke; H.-J. Schrag; A. Geipel; F. Goldschmidtboeing; P. Woias

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
351 KB
Volume
84
Category
Article
ISSN
0167-9317

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