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Three-way silicon microvalve for pneumatic applications with electrostatic actuation principle

✍ Scribed by S. Messner; J. Schaible; H. Sandmaier; R. Zengerle

Book ID: 106330313
Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 451 KB
Volume: 2
Category: Article
ISSN: 1613-4982
DOI: 10.1007/s10404-005-0048-5

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