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A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique

✍ Scribed by Hosokawa, Kazuo; Maeda, Ryutaro


Book ID
111971902
Publisher
Institute of Physics
Year
2000
Tongue
English
Weight
168 KB
Volume
10
Category
Article
ISSN
0960-1317

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