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Silicon epitaxy on hydrogen-terminated Si(001) surfaces using thermal and energetic beams

✍ Scribed by M.V.Ramana Murty; Harry A. Atwater

Book ID: 117216937
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 647 KB
Volume: 374
Category: Article
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(96)01198-3

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