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Silicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditions

✍ Scribed by A. Alian; G. Brammertz; N. Waldron; C. Merckling; G. Hellings; H.C. Lin; W.E. Wang; M. Meuris; E. Simoen; K. De Meyer; M. Heyns

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 849 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.10.002

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