Dopant redistribution and crystalline damage removal during rapid thermal annealing of Be and Mg implants in Ga0.47In0.53As

✍ Scribed by J.H. Wilkie; G.D.T. Spiller; I.D. Henning; B.J. Sealy

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 358 KB
• Volume: 85
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(87)90473-8