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SiGe-on-insulator substrate fabricated by low energy oxygen implantation

✍ Scribed by Yukari Ishikawa; T. Saito; N. Shibata; S. Fukatsu

Book ID: 114170562
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 334 KB
Volume: 147
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00590-4

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