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Fabrication of SiGe-on-insulator by rapid thermal annealing of Ge on Si-on-insulator substrate

✍ Scribed by Kentaro Kutsukake; Noritaka Usami; Kozo Fujiwara; Toru Ujihara; Gen Sazaki; Kazuo Nakajima; Baoping Zhang; Yusaburo Segawa

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 228 KB
Volume: 224
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2003.08.100

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