Photoluminescence and TEM evaluations of defects generated during SiGe-on-insulator virtual substrate fabrication: Temperature ramping process

✍ Scribed by D. Wang; S. Ii; K. Ikeda; H. Nakashima; K. Matsumoto; M. Nakamae; H. Nakashima

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 455 KB
• Volume: 253
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.10.009