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Investigation of Si/SiGe/Si on Si-on-insulator by high resolution electron microscopy and synchrotron radiation double-crystal topography

✍ Scribed by T.D. Ma; H.L. Tu; B.L. Shao; A.S. Liu; G.Y. Hu


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
397 KB
Volume
124-125
Category
Article
ISSN
0921-5107

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