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Si rings, Si clusters, and Si nanocrystalsâdifferent states of ultrathin SiO[sub x] layers

✍ Scribed by Yi, L. X.; Heitmann, J.; Scholz, R.; Zacharias, M.

Book ID: 120426767
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 515 KB
Volume: 81
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1525051

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Si rings, Si clusters, and Si nanocrystalsâdifferent states of ultrathin SiO[sub x] layers

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