✦ LIBER ✦
Direct observation of Si lattice strain and its distribution in the Si(001)âSiO[sub 2] interface transition layer
✍ Scribed by Kim, Young Pil; Choi, Si Kyung; Kim, Hyun Kyong; Moon, Dae Won
- Book ID
- 120479278
- Publisher
- American Institute of Physics
- Year
- 1997
- Tongue
- English
- Weight
- 279 KB
- Volume
- 71
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.120373
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