A multibeam electron beam induced deposition (EBID) system is presented, which can be used for the fabrication of sub-10 nm structures with EBID. This system consists of a scanning electron microscope (SEM) column and a modified source section with a microfabricated lens array. This lens array produ
โฆ LIBER โฆ
Shrinking solid-state nanopores using electron-beam-induced deposition
โ Scribed by Kox, Ronald; Chen, Chang; Maes, Guido; Lagae, Liesbet; Borghs, Gustaaf
- Book ID
- 120915132
- Publisher
- Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 649 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0957-4484
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