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Nano-fabrication using electron-beam-induced deposition combined with low energy ion milling

✍ Scribed by K. Mitsuishi; M. Shimojo; M. Tanaka; K. Furuya

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 186 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.022

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