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Preparation of Ge–C films by low-energy ion beam induced chemical vapor deposition with hexamethyldigermane

✍ Scribed by Takaomi Matsutani; Masato Kiuchi; Takae Takeuchi

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 278 KB
Volume: 257
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.01.018

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