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Deposition of diamond-like carbon films by low energy ion beam and d.c. magnetron sputtering

โœ Scribed by Amarjit Singh; Pierre Lavigne

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
806 KB
Volume
47
Category
Article
ISSN
0257-8972

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โœ Yang, Dehua; Jiang, Hai; Ott, Ronald; Minor, Kevin; Grant, Jonathan; Varga, Lajo ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 249 KB ๐Ÿ‘ 2 views

Thin รlms of FeTaN have been investigated as potential head materials for several years. However, little information related to its chemical characteristics can be found in the literature, therefore polycrystalline and epitaxial FeTaN รlms were synthesized by d.c. reactive magnetron sputtering. Foll