Diamond like carbon (DLC) films is useful for tribology, optical and biocompatible coating applications. Plasma-activated processes such as radio frequency (RF) plasma CVD and electron cyclotron resonance (ECR) microwave (MW) plasma CVD are usually used to grow DLC films. By using a bowl shaped stee
β¦ LIBER β¦
Characterization and performance of diamond-like carbon films synthesized by plasma- and ion-beam-based techniques
β Scribed by K.C. Walter; H. Kung; T. Levine; J.T. Tesmer; P. Kodali; B.P. Wood; D.J. Rej; M. Nastasi; J. Koskinen; J.-P. Hirvonen
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 434 KB
- Volume
- 74-75
- Category
- Article
- ISSN
- 0257-8972
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Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PI