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Characterization of diamond-like carbon films by SEM, XRD and Raman spectroscopy

✍ Scribed by Hua Pang; Xingquan Wang; Guling Zhang; Huan Chen; Guohua Lv; Size Yang

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 978 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.04.025

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## Abstract Thin polycrystalline diamond films were synthesized on silicon substrate by Hot Filament Chemical Vapor Deposition (HF CVD) technique from a mixture of hydrogen and different content of methyl alcohol. A comparative study on the Electron Paramagnetic Resonance (EPR), Raman spectroscopy