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Fourier transform Raman spectra of diamond-like carbon films

✍ Scribed by J. R. Durig; T. S. Little; H. D. Bist; A. Rengen; J. Narayan

Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
384 KB
Volume
23
Category
Article
ISSN
0377-0486

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## Abstract The non‐destructive characterization of intrinsic stress is very important to evaluate the reliability of devices based on diamond‐like carbon (DLC) films. Whereas the only requirement for the X‐ray diffraction method is a crystalline state of specimen, Raman spectroscopic stress analys