๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Electron-beam-induced deposition of carbonaceous microstructures using scanning electron microscopy

โœ Scribed by Naruhisa Miura; Hideaki Ishii; Jun-ichi Shirakashi; Akira Yamada; Makoto Konagai


Book ID
111715622
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
361 KB
Volume
113-114
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Multibeam electron source for nanofabric
โœ M.J. van Bruggen; B. van Someren; P. Kruit ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 375 KB

A multibeam electron beam induced deposition (EBID) system is presented, which can be used for the fabrication of sub-10 nm structures with EBID. This system consists of a scanning electron microscope (SEM) column and a modified source section with a microfabricated lens array. This lens array produ