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In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope

โœ Scribed by S. Bauerdick; C. Burkhardt; R. Rudorf; W. Barth; V. Bucher; W. Nisch


Book ID
114155598
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
519 KB
Volume
67-68
Category
Article
ISSN
0167-9317

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