Three-dimensional nanofabrication by electron-beam-induced deposition using 200-keV electrons in scanning transmission electron microscope

✍ Scribed by Z.Q. Liu; K. Mitsuishi; K. Furuya

• Book ID: 106019635
• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 191 KB
• Volume: 80
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-004-2999-x