Semiconductor-metal transition in thin VO[sub 2] films grown by ozone based atomic layer deposition

✍ Scribed by Rampelberg, Geert; Schaekers, Marc; Martens, Koen; Xie, Qi; Deduytsche, Davy; De Schutter, Bob; Blasco, Nicolas; Kittl, Jorge; Detavernier, Christophe

• Book ID: 121281416
• Publisher: American Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 809 KB
• Volume: 98
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.3579195