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Self-sticking coefficients of SiO2 films deposited through rf sputtering

✍ Scribed by R.E. Jones; C.L. Standley; L.I. Maissel

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 175 KB
Volume: 17
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(67)93167-3

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