Re-emission coefficients of Si and SiO2 films deposited through rf and d.c. sputtering : R. E. Joneset al., J. Appl. Phys.38 (12) (1967), p. 4656

• Publisher: Elsevier Science
• Year: 1969
• Tongue: English
• Weight: 97 KB
• Volume: 8
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(69)90173-5