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Self-organization of SiO2 nanodots deposited by chemical vapor deposition using an atmospheric pressure remote microplasma

โœ Scribed by Arnoult, G.; Belmonte, T.; Henrion, G.


Book ID
111878274
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
668 KB
Volume
96
Category
Article
ISSN
0003-6951

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