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Selective etching of silicon in aqueous ammonia solution

✍ Scribed by Lai-Cheng Chen; Minjan Chen; Tay-Her Tsaur; Chenhsin Lien; Chi-Chao Wan

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 842 KB
Volume: 49
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(95)01007-n

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