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Selective etching of InP in NaF solution

โœ Scribed by Zhankun Weng; Wendan Zhang; Cuiting Wu; Hongxing Cai; Changli Li; Zuobin Wang; Zhengxun Song; Aimin Liu

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
702 KB
Volume
256
Category
Article
ISSN
0169-4332

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The polarization curves of p-type and n-type silicon in aqueous KOH were studied. It is indicated that both p-Si and n-Si exhibit active-passive transpassive behaviour. The difference in polarization curve between these two types of Si is attributed to the carriers' transport limitation. In the p-Si