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Bias-dependent etching of silicon in aqueous ammonia

✍ Scribed by H. Nojiri; M. Uchiyama

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 356 KB
Volume: 34
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(92)80188-9

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