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Segregation of phosphorus to SiO2/Si(001) interfaces

✍ Scribed by J Da̧browski; H.-J Müssig; R Baierle; M.J Caldas; V Zavodinsky

Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 286 KB
Volume: 3
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(00)00014-7

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