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Segregation effects in SIMS profiling of impurities in silicon by low energy oxygen ions

✍ Scribed by M. Petravić; B.G. Svensson; J.S. Williams; J.M. Glasko


Book ID
113287936
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
438 KB
Volume
118
Category
Article
ISSN
0168-583X

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