A quantitative study of copper segregation in silicon under oxygen ion beam bombardment using SIMS

✍ Scribed by J.A. Kilner; D.S. McPhail; S.D. Littlewood

• Book ID: 113283007
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 406 KB
• Volume: 64
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(92)95547-5