✦ LIBER ✦
RBS study on bombardment-induced redistribution of copper impurities in silicon using neon, oxygen and nitrogen ion beams at different impact angles
✍ Scribed by N. Menzel; K. Wittmaack
- Book ID
- 113281226
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 552 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0168-583X
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