Comparison of profile tailing in SIMS analyses of various impurities in silicon using nitrogen, oxygen, and neon ion beams at near-normal incidence

✍ Scribed by Y. Homma; K. Wittmaack

• Book ID: 104721867
• Publisher: Springer
• Year: 1990
• Tongue: English
• Weight: 730 KB
• Volume: 50
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/bf00323600