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Secondary ion emission and sputter yields from metal targets under fluorine ion (F2+) bombardment

✍ Scribed by Reuter, Wilhad.; Clabes, J. G.

Book ID: 126904350
Publisher: American Chemical Society
Year: 1988
Tongue: English
Weight: 598 KB
Volume: 60
Category: Article
ISSN: 0003-2700
DOI: 10.1021/ac00165a012

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