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Secondary defects in recrystallised 400 keV Ge+ ion implanted Si

✍ Scribed by T.W. Fan; J.P. Zhang; R.M. Gwilliam; P.L.F. Hemment


Book ID
113282801
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
288 KB
Volume
71
Category
Article
ISSN
0168-583X

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