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Temperature effect on defect evolution in 800 keV Ge-implanted Si/SiGe multi-layered structure

✍ Scribed by P.I. Gaiduk; A.Nylandsted Larsen; J.Lundsgaard Hansen; E. Wendler; W. Wesch


Book ID
108238352
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
360 KB
Volume
340-342
Category
Article
ISSN
0921-4526

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